The JED-2300 Analysis Station™ Plus, an EDS system to perform elemental analysis by detecting characteristic X-rays generated from a specimen, was developed based on the design concept of 'Seamless from Observation to Analysis' using many years of experience of JEOL in electron optics and EDS.
This EDS system is fully integrated with our SEMs, FIB-SEMs and TEMs for comprehensive data management (microscope images and X-ray data) with an easy-to-understand user interface.
For FIB-SEM systems equipped with motor drive stages, data management over large areas is facilitated with visualized operations, such as microscope images with different magnification or different stage position, and locations of elemental maps.

Innovative Design

♦Operation icons

Icons are arranged from left to right which guide the user through each step of data collection. In addition, the functions of each icon are displayed for visual understanding.

♦Indexed image display

The operator can quickly access the acquired data from the indexed image display.

♦List of analysis data

Images and analysis results are automatically saved in the same folder for quick access. When the operator selects any area on the indexed image display, data for the respective areas will be displayed in the list of analysis data, thus simplifying data management.

Visual Peak ID

This function enables you to confirm whether the constituent elements are correctly identified in the qualitative analysis result. A spectrum is reconstructed by calculation based on the X-ray intensity of the elements identified in the qualitative analysis.

The peak shape of the Bi X-ray lines is found to be different between the acquired spectrum (pink) and the calculated spectrum (blue).

Re-examination of the Bi peak position indicated the presence of Pb.
When Pb was added to the analysis results, the two peak shapes matched. From this result, Pb was confirmed to be contained in the specimen.

Play Back Analysis functions

Conventional elemental mapping acquires until there are sufficient X-ray counts and saves a spectrum where the accumulated counts of all frames for the spectrum are stored at each pixel. Play Back Analysis functions available for the JED-2300 Analysis Station™ Plus can replay this data like animation, after the acquisition of elemental maps. Thus, this function can help make a broad range of analyses. For example, you can confirm the presence or absence of specimen deformation during map acquisition or change of elements in a specimen during In-situ analysis such as heating.

Smile Station™ 2

Elemental maps are automatically acquired, allowing the user to select only necessary areas from a montaged image or multiple microscope images, thus allowing efficient analysis of complex areas.

Particle Analysis Software 2

♦Particle analysis function

Acquisition of morphological information on the detected featured-objects (specific particles, etc.) is enabled based on intensity differences in microscope image (backscattered electron composition image, etc.). These featured-objects can be subjected to automatic EDS analysis. Various featured-objects are analyzed by setting analysis conditions, including the intensity difference in the image, as well as size and shape. Combined use with Smile Station™ 2 enables automatic particle analysis over wide areas. This function also extends its applications to include: inclusions in mineral grains, distinguishing the featured-objects with a specific shape, and particles collected on filters.

♦Statistical processing

For each particle, the EDS analysis results and particle-shape information (particle diameter, area, etc.) are recorded. You can create graphs or tables from the information for statistical processing.

♦Example of automatic analysis (asbestos)

Asbestos exhibits a high aspect ratio shape. The Particle Analysis Software 2 can select the aspect ratio to the asbestos (fibers) for EDS analysis and therefore, only the appropriate size and shape particles will be distinguished and measured. From the EDS analysis results, you can determine whether or not the analyzed needle-shape particle is asbestos and can classify the type of asbestos. You can also re-confirm the analysis results of each particle after the completion of analysis.

Dry Silicon Drift Detector

Unlike conventional Si(Li) type EDS detectors, the Dry Silicon Drift Detector does not require liquid nitrogen. Maintenance is easier and the SDD allows higher X-ray count throughput. The use of the large area Dry Silicon Drift Detectors allows for elemental analysis even with a small probe current.

List of the Dry Silicon Drift Detectors

Scanning Electron Microscope Detection area Energy resolution Detectable elements
JCM-6000 Series 10 mm 133.0 eV or less B to U
JSM-IT100 Series 10.30 mm 129.0 eV or less Be to U
JSM-IT300 Series
FE-SEM 		10.30 mm 129.0 eV or less Be to U
60.100 mm 133.0 eV or less B to U

・For the JSM-IT100 Series, the functions presented in this web page are applicable only when the JED-2300 Analysis Station™ Plus is installed on JSM-IT100 or JSM-IT100LV. Different analysis software is used for JSM-IT100A and JSM-IT100LA.

Jeol Ltd. published this content on 24 January 2017 and is solely responsible for the information contained herein.
Distributed by Public, unedited and unaltered, on 24 January 2017 06:05:06 UTC.

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