JEOL : Release of the JIB-4700F, a New Multi Beam System (Focused Ion Beam-Scanning Electron Microscope (FIB-SEM)) – High Resolution, High Throughput System for Nano Milling and Analysis –

JEOL Ltd. (President Gon-emon Kurihara) announces the release of the JIB-4700F Multi Beam System, a newly-developed FIB-SEM instrument to be distributed in January 5, 2017.

Product development background

Advances in the development of new materials featuring complex nanostructures places increased demands on FIB-SEM instruments for exceptional resolution, accuracy and throughput. In response, JEOL has developed the JIB-4700F Multi Beam System, a new processing and observation system to be used in morphological observations, elemental and crystallographic analyses of a variety of specimens.

The JIB-4700F features a hybrid conical objective lens, GENTLEBEAM™ (GB mode) and an in-lens detector system to deliver a guaranteed resolution of 1.6 nm at a low accelerating voltage of 1 kV. Using an 'in-lens Schottky-emission electron gun' that produces an electron beam with a maximum probe-current of 300 nA, this newly-developed instrument allows for high-resolution observations and fast analyses. For the FIB column, a high-current density Ga ion beam of up to 90 nA maximum probe-current is employed for fast ion milling and processing of specimens.

Concurrent with high-speed cross-section processing by FIB, high-resolution SEM observations and fast analyses can be conducted utilizing energy dispersive X-ray spectroscopy (EDS) and electron backscatter diffraction (EBSD). Additionally, a three-dimensional analysis function that automatically captures SEM images at certain intervals in cross-section processing is provided as one of the JIB-4700F's standard features. This Multi Beam System will be offered to public and private R&D sites and semiconductor manufactures.

Main Features

1. High-resolution SEM observation
   Guaranteed resolution of 1.6 nm at a low accelerating voltage of 1 kV is delivered by a magnetic/electrostatic hybrid conical objective lens, GB mode and in-lens detector.
2. Fast analysis
   Fast analysis is enabled because high resolution can be maintained in analyses under large probe-current by the combination with an in-lens Schottky-emission electron gun and aperture angle control lens.
3. High-speed processing
   High-power Ga ion beam column enables rapid processing of specimens.
4. Enhanced detection system
   Simultaneous detection system involving the newly-developed in-lens detectors allows for real-time observation of images from up to 4 detectors.
5. Versatility
   The JIB-4700F is compatible with a variety of optional attachments including EDS, EBSD, cryo-transfer systems, cooling stages and air-isolated transfer systems, etc.
6. Three-dimensional observation/analysis
   Three-dimensional visualization of images and analysis data is possible with the combination with high-resolution SEM and appropriate optional analysis unit(s).
7. Stage linkage function
   With the atmosphere pick-up system (optional) and stage linkage function, TEM (transmission electron microscope) specimens can be retracted with ease.
8. Picture overlay system
   Overlaying optical microscope images from the atmosphere pick-up system on FIB images makes it easier to identify a FIB processing point.

Main Specifications

Annual unit sales target

20 units/year (initial year)

Link

For more information about JEOL Ltd. or any JEOL products, visit www.jeol.com.