JEOL Ltd. (President Gon-emon Kurihara) announces the release of a new scanning electron microscope, the JSM-IT100 InTouchScope™. This brand-new instrument offers high-resolution performance equivalent to high-end instruments in a compact, space-efficient configuration.

Product development background

Scanning electron microscopes are used in a wide range of fields, such as biotechnology and nanotechnology, covering a variety of applications, from materials development, testing, evaluation, and defect analysis to quality control procedures and many others. This diversity of applications calls for flexible and space-saving equipment that can be installed at all kinds of research laboratories and manufacturing sites. In this context, the benchtop scanning electron microscope has been the primary choice for customers with limited space for years.
The new JSM-IT100 has a footprint 30% smaller than its predecessors [JSM-6510, JSM-6010Plus InTouchScope™], requiring only about the same space as a benchtop scanning electron microscope, which considerably increases flexibility at the installation site.
Building off of the highly successful and award winning predecessors [JSM-6010/JSM-6010Plus InTouchScope™], the JSM-IT100 is remarkably intuitive to operate even for inexperienced users. Observation of microstructure to elemental analysis can be had at the touch of a button. The new JSM-IT100 series consists of the following 4 models for the customer to configure to their specific needs: The JSM-IT100(BU) basic model, the JSM-IT100(LV) includes low-vacuum observation, the JSM-IT100(A) includes a fully embedded EDS system for elemental analysis, and the all-in-one JSM-IT100(LA) providing both low-vacuum observation and EDS analysis capability.
The InTouchScope™ series has been the choice of customers around the world since its release in 2010, with the total number of units shipped expected to exceed 1,000 within this fiscal year.

Main Features
  1. The Touch panel enables comfortable and intuitive operation.
  2. An easy-to-use software interface includes full integration of observation and elemental analysis, allowing even inexperienced users to accomplish any task with high efficiency.
  3. Besides low-vacuum observation and elemental analysis capability, this new all-in-one SEM offers extremely high flexibility and can be equipped with the same options as high-end instruments.
  4. Expanded EDS functions are now included such as: area analysis and line scans.
  5. The system offers space-saving and easy installation. A 100V power outlet is sufficient for installation. No cooling water is needed.
Main Specifications
Resolution High-vacuum mode: 4.0nm (20kV), 3.0nm (30kV)*
Low-vacuum mode: 5.0nm (20kV), 4.0nm (30kV)*
Magnification ×5 to ×300,000
Accelerating voltage 0.5kV to 20kV, 0.5kV to 30kV*
Specimen stage Large eucentric stage (5 -axis, manual drive X, Y, Z, R, T )
X:80mm, Y:40mm, Z:5mm to 48mm,
T: - 10° to + 90°, R:360°
Maximum specimen size Diameter 150mm
Instrument dimensions W:630mm x D:840mm x H:1450mm

*With the accelerating voltage extension kit installed

JSM-IT100(LA)

Annual unit sales target

300 units/ year

JEOL Ltd.

JEOL is a world leader in electron optical equipment and instrumentation for high-end scientific and industrial research and development. Core product groups include electron microscopes (SEMs and TEMs), instruments for the semiconductor industry (electron beam lithography and a series of defect review and inspection tools), and analytical instruments including mass spectrometers, NMRs and ESRs.

For more information about JEOL Ltd. or any JEOL products, visit www.jeol.com.

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