Nikon : Releases New FPD Lithography Systems FX-103S and FX-103SH
February 21, 2018 at 11:15 pm EST
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February 22, 2018
Nikon Corporation (Kazuo Ushida, President, Tokyo) today announced the release of two FPD Lithography Systems, FX-103S and FX-103SH. Supporting the 10.5th generation plate size, the FX-103S and FX-103SH are FPD lithography systems optimized for the mass production of 4K and 8K TVs, which are expected to become widespread in future, as well as LCD panels for high-definition tablets and organic light emitting diode (OLED) panels. The sale of these systems began in the last quarter of CY 2017.
Development Background
The FX-103S/103SH incorporate techniques from both the 6th generation FPD Lithography System FX-67S2, which is ideal for the production of small and medium-sized high-definition panels, and the 8th generation FPD Lithography System FX-86SH2, which excels in the production of TV panels. These developments realize an FPD lithography system optimized for manufacturing high-definition large-sized panels.
The FX-103S achieves a shorter takt time than the conventional 10th generation FPD Lithography System FX-101S, to improve productivity. In addition, the FX-103SH enables high resolution to further meet our customers' needs.
Key Features
1. Short Takt Time
Incorporating the renewed exposure sequence and calibration sequence of the conventional FX-101S, the FX-103S/103SH realize faster speed and higher accuracy exposure.
2. High Resolution
In making the 10.5th -generation FPD lithography system, the FX-103SH has fully enhanced illumination and multi-lens systems, both of which use Nikon's proprietary resolution enhancement technique, originally developed for the high resolution 8th generation FPD Lithography System FX-86SH2. Furthermore, the FX-103SH incorporates a new auto-focus system that optimally corrects the measurement errors of mask bending and plate flatness. This enables a high resolution of 2.2 μm (L/S*) while also ensuring a wide depth of focus.
3. High Alignment Accuracy
The position measuring system of the conventional FX-101S is renewed to improve measurement results, achieving the high alignment accuracy of ±0.5 μm.
4. High Throughput
The FX-103S/103SH achieve the high throughput of 480 plates per hour for 65' panels, up 77% compared with the conventional FX-101S. For 75' panels, the FX-103S/103SH attain 322 plates per hour.
Performance Overview
FX-103S
FX-103SH
Resolution (L/S)
3.0 μm (g+h+i-line)
2.2 μm (g+h+i-line)
Projection Magnification
1:1
Alignment Accuracy
≤±0.5 μm
Plate Size
3370 mm x 2940 mm
Takt Time
60 sec/plate
(Conditions: 3370 mm x 2940 mm, 4 scans, g+h+i-line, 30 mJ/cm2)
Nikon Corporation published this content on 22 February 2018 and is solely responsible for the information contained herein. Distributed by Public, unedited and unaltered, on 22 February 2018 04:15:00 UTC.
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Nikon Corporation specializes in the design, manufacturing and marketing of photographic and optic equipments. Net sales break down by family of products as follows:
- precision industrial equipments (39.1%): scanners, LCD steppers, lithography systems, etc.;
- imaging equipments (33%): especially cameras and camcorders;
- diagnostic instruments, microscopes and retinal imaging devices (13.6%);
- optical components (7.6%);
- other (6.7%): industrial measuring instruments, ophthalmic lenses, binoculars, telescopes, magnifiers, etc.
Net sales break down geographically as follows: Japan (18.2%), China (28.4%), the United States (24%), Europe (13.4%) and other (16%).