Come and visit us during Semicon West 2014 in the West Hall at Intersolar Booth 7621.

Kahl am Main, July 7, 2014 - The ROTARIS vacuum coating system from SINGULUS TECHNOLOGIES (SINGULUS) is a modular machine for precise coating in ultra-high vacuum (up to 10-8 mbar). The system has been designed especially for research and development in the semiconductor industry and other more general applications.

In order to further develop applications in the semiconductor industry, many respective research institutions are in need of flexible R&D platforms such as the SINGULUS' nano deposition machine.

ROTARIS Applications & Features

  • Rotating substrate deposition
  • 200 mm and 300 mm wafer processing
  • Up to 12 PVD cathodes, target Ø 100 mm
  • Co-sputtering
  • DC/RF sputtering
  • Base pressure < 10-8 Torr
  • Hot wafer deposition
  • Options: ICP ion source, in-situ aligning magnetic field

The ROTARIS ultra-high vacuum system is a modular platform for fast, precise and fully automated thin-film sputter deposition. The ROTARIS is a bridge system for 200 mm and 300 mm wafer processing. Its main deposition chamber RSM (Rotating-Substrate-Module) can house up to 12 physical vapor deposition (PVD) cathodes with a target diameter of 100 mm. The ROTARIS design provides in particular a rotating substrate deposition technology with the additional capability to tilt the substrate. Additional features for R&D are "Co-sputtering" with up to four cathodes, DC-, pulsed DC-, RF-sputtering, wafer heating, and an in-situ aligning magnetic field.

The installation of an ion source as alternative equipment allows surface treatment and smoothing, ion milling and side wall cleaning.

SINGULUS TECHNOLOGIES - Innovations for New Technologies
SINGULUS' goal is the technologic leadership in the segments Optical Disc, Solar and Semiconductor as well as the use of synergies to open new work areas in the future.

In the Optical Disc segment SINGULUS continues to expand its market leadership and today is already able to offer machines, which enable the production of Blu-ray Discs with about 100 GB in total. With its advanced production solutions SINGULUS is the worldwide leader for efficient manufacturing equipment for crystalline and thin-film solar cells. In the Semiconductor segment SINGULUS focuses its activities on the vacuum coating of wafers with ultra-thin layers.

SINGULUS is continuously expanding its technologic know-how in the areas vacuum coating, automation, process technology as well as the integration of production steps in order to open further, attractive work areas.

SINGULUS TECHNOLOGIES AG, Hanauer Landstraße 103, D-63796 Kahl/Main, ISIN: DE0007238909, WKN: 723890

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