Tokyo Electron Limited announces that the following partial changes in the organization and personnel changes have been decided.

1. Partial Changes in the Organization Effective on October 1st, 2015
(1) 'Field Solutions Dept.' under FSBU(BUGM: Kiyoshi Sunohara) will be divided into 'Field Solutions 1st Dept.' and 'Field Solutions 2nd Dept.'.
(2) 'Corporate Branding Promotion Dept.' will be abolished and the function will be merged to 'General Affairs Dept.' under Human Resources & General Affairs Division (General Manager: Tatsuya Nagakubo).

2. Personnel Change for Executive Officer of Subsidiary Effective on October 1st, 2015

Name Continuing Position New Position Current Position
Masayuki
Kojima 		- Senior Executive Vice
President, Tokyo Electron
Miyagi Ltd. 		Senior Vice President, Tokyo
Electron Miyagi Ltd.

3. Other Personnel Changes Effective on October 1st, 2015

Name Continuing Position* New Position Current Position
Fumihiko
Kaminaga 		- Director,
Field Solutions 1st Dept. 		Director,
Field Solutions Dept.
Tetsuya
Nakahara 		- Director,
Field Solutions 2nd Dept. 		Senior Manager,
Field Solutions Dept.
Tatsuya
Nagakubo 		Corporate Director
VP&General Manager,
Human Resources &
General Affairs Division
/ CSR Promotion 		- VP&General Manager,
Corporate Branding Promotion
Director, Corporate Branding
Promotion Dept.
Director, CSR Promotion Dept.
Tatsuya
Aso 		Director, General Affairs
Dept. 		Director, CSR Promotion
Dept. 		-
Hiroshi
Kawamoto 		- Director, Corporate Strategic
Planning Dept. 		Senior Manager, Corporate
Strategic Planning Dept.
Hiroshi
Takagi 		- Senior Manager, Corporate
Strategic Planning Dept. 		Director, Corporate Strategic
Planning Dept.
Shunichi
Iimuro 		VP, Tokyo Electron
Yamanashi Ltd. 		General Manager, Yamanashi
Regional Office 		-
Minoru
Aoyagi 		Senior Vice President,
Tokyo Electron
Yamanashi Ltd. 		- General Manager,Yamanashi
Regional Office

* Some Continuing Positions of Subsidiary's Board of Directors are abbreviated.

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