Semicon Europa in Munich, Germany at B1-110 through November 17

WaferSense® and ReticleSense® deliver 3 compelling bottom lines.

  • Save Time ~ 88% reduction, half the manpower
  • Save Expense ~95% reduction
  • Increase Throughput ~20X

What can the WaferSense and Reticle Sense Auto Multi Sensors do for your fab?

Speed equipment qualification with wireless measurements.

  • Collect and display acceleration, vibration, leveling and humidity data.
  • Monitor humidity in wafer environments.
  • Use the Auto Multi Sensor with MultiView™ and MultiReview™ software for real-time equipment diagnostics.
  • See the effects of adjustments in real-time, speeding equipment alignment and set-up.

Shorten equipment maintenance cycles with thin and lightweight wafer-like form factor.

  • Thinner 3.5mm form factor provides access to more chambers.
  • Operates at higher temperatures.
  • Keep the process areas unexposed to the fab environment with vacuum compatible AMS.

Lower equipment maintenance expenses and enhance process uniformity with objective and reproducible data.

  • Take the human element out of adjusting your equipment with objective measurements for multiple applications in one.
  • Make the right adjustments time after time.
  • Receive early warning for impending equipment failures and optimize your preventative maintenance plans.

Learn More About the WaferSense® Product Line »

Learn More About the ReticleSense® Product Line »

CyberOptics Corporation
Technology Leadership. Global Solutions.
Semicon Europa Show Information »

CyberOptics Corporation published this content on 15 November 2017 and is solely responsible for the information contained herein.
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