Nordson : MARCH Introduces the SPHERE Series Plasma Treatment Systems for Semiconductor Applications
July 01, 2015 at 05:23 am EDT
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Nordson MARCH to be exhibiting at SEMICON West booth #5743
01 Jul 2015
Concord, California, USA - 01 July 2015 - Nordson MARCH, a Nordson company (NASDAQ:NDSN), a global leader in plasma processing technology, announces its new SPHERE™ Series plasma systems for wafer-level and 3D packaging applications . Based on Nordson MARCH's TRAK™ Series, the new series consists of the TrophoSPHERE™ and StratoSPHERE™ plasma treatment systems. The systems perform descum, ashing (photoresist/polymer stripping), dielectric etch, wafer bumping, organic contamination removal, and wafer destress. Both systems support automated handling and processing of round or square wafers and can process thin wafers with or without a carrier, depending upon the wafer thickness.
The SPHERE Series models are differentiated by the size of their chambers. The TropoSPHERE system has the smallest chamber. It is designed for high-throughput processing of semiconductor wafers and other flat substrates in sizes ranging from 76 mm (3 in.) to 200 mm (8 in.) in diameter for wafers held in open cassettes. The StratoSPHERE plasma system handles semiconductor wafers up to 300mm (12 in.) in diameter. Both series utilize a patented plasma chamber design that provides exceptional etch uniformity and process repeatability. The control architecture enables short plasma cycle times with very low overhead, ensuring that throughput is maximized and cost of ownership is minimized.
"Nordson MARCH's SPHERE Series is an easy way to eliminate problems caused by contaminants that result from the semiconductor manufacturing process," said Jonathan Doan, director of marketing, Nordson MARCH. "Our plasma treatment can be used for both wafer cleaning and a variety of etching, ashing, and descum steps along with contamination removal, surface roughening, increasing wettability, and enhancing bonding and adhesion strength. I invite SEMICON West attendees to meet with our technical experts at the Nordson MARCH booth #5743 to discuss how plasma treatment can improve the quality and success of their manufacturing process and products."
Nordson MARCH technical experts will be in booth #5743 at SEMICON West 2015, held in the Moscone Convention Center, San Francisco, CA from July 14-16 to discuss your applications. For more information or to schedule an appointment, contact Nordson MARCH atinfo@nordsonmarch.com or call +1.925.827.1240.
Nordson Corporation specializes in the design, manufacture and marketing of equipment and systems for the precision dispensing, application and control of adhesives, coatings, polymers, sealants and biomaterials. Net sales break down by business area as follows:
- industry and consumer durable and non-durable (52.9%): precision systems and accessories for the application of adhesives, coatings, paints, finishes, sealants and other surface treatment materials (applicators, automated spray guns, etc.);
- electronics, medical industry and high technology (47.1%): Surface treatment, controlled material and fluid dispensing, testing and post-dispensing inspection systems used in production processes (coating application and inspection equipment, mixers, syringes, cartridges, nozzles, fittings and connectors, tubes, balloons, catheters, acoustic and optical inspection systems, bond testers, curing modules, dryers, extrusion systems, cartridge filling systems, micromaterial testing systems, etc. ).
At the end of October 2023, the group has 42 manufacturing sites worldwide.
Net sales are distributed geographically as follows: America (43.7%), Asia/Pacific (30.3%) and Europe (26%).
NORDSON CORPORATION 
