SC300-HT series
Largest share (based on the survey conducted by Shibaura Mechatronics) among the single-wafer nitride film etching processes.
This high-temperature phosphoric acid etching system supports 300mm wafers.
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Shibaura Mechatronics Corporation published this content on 12 September 2022 and is solely responsible for the information contained therein. Distributed by Public, unedited and unaltered, on 12 September 2022 04:29:04 UTC.