High-temperature Phosphoric Acid Etching System
SC300-HT series

Largest share (based on the survey conducted by Shibaura Mechatronics) among the single-wafer nitride film etching processes.
This high-temperature phosphoric acid etching system supports 300mm wafers.

Attachments

  • Original Link
  • Original Document
  • Permalink

Disclaimer

Shibaura Mechatronics Corporation published this content on 12 September 2022 and is solely responsible for the information contained therein. Distributed by Public, unedited and unaltered, on 12 September 2022 04:29:04 UTC.