JEOL : Release of a New Field Emission Scanning Electron Microscope JSM-7200F － Multi-purpose FE-SEM combining high-resolution and easy operation －
August 27, 2015 at 09:25 pm EDT
Share
Release of a New Field Emission Scanning Electron Microscope JSM-7200F － Multi-purpose FE-SEM combining high-resolution and easy operation －
2015/08/10
JEOL Ltd. (President Gon-emon Kurihara) announces the development of a new field emission scanning electron microscope, JSM-7200F, which will be available for sale from August 2015.
Product development background
Scanning electron microscopes have been used in a wide range of fields and for diverse applications. The JSM-7200F utilizes JEOL proprietary in-lens Schottky Plus technology that allows improvement in the resolution at low accelerating voltages (1.6 nm @ 1 kV), and achieves maximum probe current of 300 nA. The JSM-7200F is a multi-purpose FE-SEM that can satisfy a wide range of needs with both higher resolution and easier operation than conventional instruments.
Main Features
High resolution
High resolution of 1.6 nm (at 1 kV), 1.2nm(at 30kV)
High-speed analysis
Maximum probe current of 300 nA, allowing short acquisition time for EDS, WDS, and EBSD, while maintaining high resolution.
Energy signal differentiation
Incorporation of the TTL (through-the-lens) system in the standard configuration enables the use of energy filtering to selectively differentiate the electron energies.
Wide area analysis
The LDF (long depth of field) mode enables applications like wide-area EBSD analysis, without the need to use stage scan (montage)
Main Specifications
Resolution
1.6 nm (at accelerating voltage 1 kV),
1.2 nm (at accelerating voltage 30 kV)
3.0 nm (at accelerating voltage 15 kV, WD 10 mm,
probe current 5 nA / Analysis condition)
Magnification
×10 to ×1,000,000
Imaging modes
Secondary electron image, Backscattered electron image
Accelerating voltage
0.01 to 30 kV
Probe current
1 pA to 300 nA
Electron gun
In-lens Schottky field emission gun
Motor control
5-axis motor drive stage
Stage movement
X - Y : 35 mm x 50 mm, Z: 2.0 to 41 mm
Tilt: - 5 to 70°, Rotation: 360° endless
Specimen exchange chamber
Included in the standard configuration
Annual unit sales target
70 units/ year (initial year)
JEOL Ltd.
JEOL is a world leader in electron optical equipment and instrumentation for high-end scientific and industrial research and development. Core product groups include electron microscopes (SEMs and TEMs), instruments for the semiconductor industry (electron beam lithography and a series of defect review and inspection tools), and analytical instruments including mass spectrometers, NMRs and ESRs.
For more information about JEOL Ltd. or any JEOL products, visit www.jeol.com.
JEOL Ltd. is a Japan-based company mainly engaged in the manufacture, sale, maintenance, development and research of scientific instruments, semiconductor related equipment, industrial and medical equipment, and related products and parts. It operates through three business segments. Science and Measurement Equipment segment manufactures and sells three types of equipment. Electron optical devices include electron microscopes, peripheral devices and others. Analytical instruments include nuclear magnetic resonance equipment, electron spin resonance equipment and others. Measurement and inspection equipment include scanning electron microscopes, analytical scanning electron microscopes, peripheral equipment and others. Industrial Equipment segment manufactures and sells electron beam lithography equipment, linear electron guns and power supplies and others. Medical Equipment segment manufactures and sells clinical test information processing systems, and automatic amino acid analyzers.
JEOL LTD. 
