TIMARIS PVD Cluster Tool Platform for Pilot and High Volume Semiconductor Production

Come and visit us during Semicon West 2014 in the West Hall at Intersolar Booth 7621.

Kahl am Main, July 7, 2014 - SINGULUS TECHNOLOGIES is a renowned manufacturer of advanced thin-film deposition equipment for MRAM, thin-film head, sensor and other semiconductor applications.

SINGULUS has already established and qualified a PVD Cluster Tool platform in the market and is offering a complete portfolio of process modules for the deposition of ultra-thin metallic and insulating films down to a thickness of one nanometer and below and stacks of such films with very precise material thickness and high uniformity specifications.

As of today, more than ten process modules are available to configure a TIMARIS system according to customer needs. These modules include the Multi-Target-Module, Oxidation-Process-Module, Pre-Clean-Module, Combi-Process and Static-Deposition-Modules as well as the Rotating-Substrate-Module. The TIMARIS PVD modules incorporate the full scope of sputtering techniques as: DC magnetron sputtering, pulsed DC magnetron sputtering and RF magnetron sputtering as well as combinations of these deposition modes are selectable by recipe specifications.

The TIMARIS platform incorporates the Linear Dynamic Deposition, US patent US 7,799,179 B2, technology in combination with ten sputter targets in one vacuum chamber. The Linear Dynamic Deposition technology is especially designed for deposition of ultra-thin films, magnetic films, high-quality metallic, conductive and insulating films and is the key to deliver world class material uniformity across large wafer sizes, combined with an exceptionally precise control of ultra-thin layer thickness down to 1% of a nanometer.

TIMARIS Range of Applications

  • MRAM
  • SST-RAM
  • Sensors
  • Transducers & inductors
  • Phase-change material
  • High-k dielectrics
  • Metal gates
  • Read/Write Heads

SINGULUS TECHNOLOGIES - Innovations for New Technologies
SINGULUS' goal is the technologic leadership in the segments Optical Disc, Solar and Semiconductor as well as the use of synergies to open new work areas in the future.

In the Optical Disc segment SINGULUS continues to expand its market leadership and today is already able to offer machines, which enable the production of Blu-ray Discs with about 100 GB in total. With its advanced production solutions SINGULUS is the worldwide leader for efficient manufacturing equipment for crystalline and thin-film solar cells. In the Semiconductor segment SINGULUS focuses its activities on the vacuum coating of wafers with ultra-thin layers.

SINGULUS is continuously expanding its technologic know-how in the areas vacuum coating, automation, process technology as well as the integration of production steps in order to open further, attractive work areas.

SINGULUS TECHNOLOGIES AG, Hanauer Landstraße 103, D-63796 Kahl/Main, ISIN: DE0007238909, WKN: 723890

distributed by