Singulus Technologies AG has received an order from a European semiconductor manufacturer for a vacuum coating system of the type ROTARIS. The application area is the series production of high-precision magnetic TMR (Tunnel Magneto Resistance) sensors that are increasingly finding use, in the automotive sector, in PV inverters and for industrial applications. The contract volume is in the low single-digit million euros. The cluster tools of the type ROTARIS enables layers to build up in an ultra-high vacuum in production conditions with a reproducibility accurate to one tenth of an angstrom (10-11 m). That is less than one atomic monolayer distributed homogeneously over a wafer with a diameter of 300 mm. Such extreme precision is essential e.g., in TMR sensors which make use of tunnel magnetoresistance. TMR sensors show higher resistance changes than conventional AMR, GMR or Hall sensors and exhibit a very large dynamic range. They can be used, to measure indirect line currents reliably and with electrical isolation, based on their magnetic field. Applications include the automotive industry, the charging infrastructure for electric vehicles and PV inverters. The vacuum coating system, which operates using the sputtering principle, reinforces the market position of SINGULUS TECHNOLOGIES as a manufacturer and development partner for innovative coating technologies for the various different semiconductor applications. The ROTARIS system uses the rotating substrate module principle. As well as lending itself to uses in industrial manufacturing, the machine is perfect for research and development applications that call for a high degree of flexibility.