Sumco plans to invest 225 billion yen in factory buildings and equipment, with the subsidy from Japan's METI (Ministry of Economy, Trade and Industry) covering a third of the cost, Nikkei said.
Japan has been subsidising chipmakers and suppliers, including Taiwan's TSMC, to reinvigorate the industry domestically and as countries extend control over a supply chain vital to key sectors.
($1 = 141.3300 yen)
(Reporting by Sam Nussey; Editing by Richard Chang)